Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser

This paper presents an intentional investigation of the effect object tilt angle on tracking local minimum method (TL method), which is one for detecting measurement target position optical axis, in a chromatic confocal probe employing differential dual-fiber-detector system with mode-locked femtosecond laser as light source. The dual-detector probes, and even has not been investigated detail so far, although scanning probes studied. At first, to examine influence TL method, theoretical model established, numerical simulations are performed based established equation. Then, aberrations optics response curve experiments. Finally, investigations demonstrated